Fundamentals, impedance, and performance of solid-state Li-metal microbatteries

The authors report novel results toward optimizing the electrochemical performance of high vacuum deposited lithium-based all solid-state thin film microbatteries. This study investigated hermetic encapsulation, interfacial lithium formation processes, and the role of Li-blocking and Li-nucleating layers for improved Li-metal plating on copper anodes. Photoresist was found to be an effective temporary encapsulation material, where prior to cycling, well-encapsulated Li-metal full cells yielded a total resistance reduction of nearly two orders of magnitude (282 Ω cm2) and a total capacitance increase of roughly an order of magnitude (1.35 × 10−10 F/cm2) compared with nonencapsulated Li-metal full cells. To accelerate potential failure mechanisms, high stress applied currents were used during the electrochemical formation processes. Initial cycles caused high resistance voids to form at th…