Controlled Fracture‐Based Micropatterning of Ruddlesden–Popper Halide Perovskite for Ultra High‐Density Arrays of Micro Light Emitting Diodes

Abstract Quasi‐2D Ruddlesden–Popper perovskite (RPP) have surfaced as a promising candidate for light emitting diodes (LEDs) due to its outstanding optoelectronic properties. However, a reliable approach for patterning RPPs remains elusive due to the use of polar solvents in lithographic processes, which can damage the RPP. Here, a reliable and damage‐free dry micropatterning method of RPPs is reported, which also offers a cost/time advantage compared to conventional patterning methods. The sharp edges of high aspect ratio silicon micropillars are used to cut RPPs to a pre‐defined shape and then the cut RPPs are delaminated to obtain a patterned array of RPPs. The resultant patterned array exhibits no sign of degradation or discernable difference between adjacent pixels, achieving a ≈100% yield. The obtained array is utilized to fabricate a pixelated LED where a sharp electroluminescence…