Nanocrystal Engineering of Thin-Film Yttria-Stabilized Zirconia Electrolytes for Low-Temperature Solid-Oxide Fuel Cells

To overcome significantly sluggish oxygen-ion conduction in the electrolytes of low-temperature solid-oxide fuel cells (SOFCs), numerous researchers have devoted considerable effort to fabricating the electrolytes as thin as possible. However, thickness is not the only factor that affects the electrolyte performance; roughness, grain size, and internal film stress also play a role. In this study, yttria-stabilized zirconia (YSZ) was deposited via a reactive sputtering process to fabricate high-performance thin-film electrolytes. Various sputtering chamber pressures (5, 10, and 15 mTorr) were investigated to improve the electrolytes. As a result, high surface area, large grain size, and residual tensile stress were successfully obtained by increasing the sputtering pressure. To clarify the correlation between the microstructure and electrolyte performance, a YSZ thin-film electrolyte was …