Wafer-Scale Homogenous Growth of Tungsten Disulfide via Promoter-Assisted Metal–Organic Chemical Vapor Deposition

High Resolution Image Download MS PowerPoint Slide Two-dimensional semiconducting transition metal dichalcogenides (TMDs) are promising materials for next-generation electronics and optoelectronics due to their exceptional electrical and optical properties. However, achieving wafer-scale growth of high-quality uniform TMDs films remains challenging. In this study, we demonstrate the wafer-scale growth of monolayer tungsten disulfides (WS 2 ) using metal–organic chemical vapor deposition, a widely adopted method in compound semiconductor fabrication. The resulting WS 2 films exhibit high uniformity and optical properties comparable to exfoliated single-crystal. Film quality was further enhanced by spin-coating sodium chloride as a promoter prior to growth, which increased grain size from tens to hundreds of nanometers and significantly improved optical performances. These improvements, co…