Ferroelectric Polarization-Switching Dynamics and Wake-Up Effect in Si-Doped HfO2

The ferroelectricity in ultrathin HfO 2 offers a viable alternative to ferroelectric memory. A reliable switching behavior is required for commercial applications; however, many intriguing features of this material have not been resolved. Herein, we report an increase in the remnant polarization after electric field cycling, known as the “wake-up” effect, in terms of the change in the polarization-switching dynamics of a Si-doped HfO 2 thin film. Compared with a pristine specimen, the Si-doped HfO 2 thin film exhibited a partial increase in polarization after a finite number of ferroelectric switching behaviors. The polarization-switching behavior was analyzed using the nucleation-limited switching model characterized by a Lorentzian distribution of logarithmic domain-switching times. The polarization switching was simulated using the Monte Carlo method with respect to the effect of defe…