Defect-Controlled, Scalable Layer-by-Layer Assembly of High-k Perovskite Oxide Nanosheets for All Two-Dimensional Nanoelectronics

Two-dimensional (2D) nanosheets hold great promise as a material platform in the next-generation electronic and optoelectronic devices due to their wide tunability in physical and chemical properties, outstanding electrical, and mechanical stability. However, their extensive application in practical devices have been seriously limited by the absence of large-area fabrication technology with defect control capability and good spatial uniformity. Here, we report a general strategy to obtain large-area, defect-controlled high-k dielectric films via scalable layer-by-layer assembly of single-crystalline perovskite oxide nanosheets for all-2D field-effect transistors (FETs). In particular, a new material design for Dion-Jacobson-type Sr 1.8 Bi 0.2 Nb 3 O 10 nanosheets was carried out to obtain high dielectric permittivity. In addition, a large-area (4 cm × 4 cm) fabrication of multilayered Sr…